Make-to-order (MTO) – Engineering

Research and development for the semiconductor industry are our core activities, with fluid simulation and process automation being our specialty.

  • Engineering
  • CAD (Computer Aided Design)
  • Simulation
  • Automation

Services, upgrades & more

Spare parts and refurbishment of SEZ products

4TEX offers a broad range of services for semiconductor tools like SEZ spin etchers (SP101, SP201, SP102, SP203, SP304, SP223 and SP323). We have a team of specialized experts with long-standing experience in the semiconductor environment – and we provide the necessary infrastructure as well! Any parts and devices required by our customers can be assembled in our class 1 cleanroom here at 4TEX.

Equipment services – maintenance

  • Support for older-generation tools
  • Engineering
  • Field service support
  • System checks
  • Tool installation and deinstallation
  • Tool relocation
  • Complete tool refurbishments


We deliver customized solutions, tailor-made to your requirements. Amongst our available upgrades are …

  • Compax3 upgrades
  • Medium dispenser upgrades
  • Transparent funnels
  • N2 monitoring
  • Chuck inspection

Consumables and spare parts

We offer / deliver / assemble …

  • PFA hoses and teach wafers
  • spare parts and outdated parts
  • analyses and assessment of critical parts (availability)
  • delivery of alternative parts (including finding a proper „solution“ for outdated parts)
  • repair and exchange programs
  • carrying out measurements and tests
Please visit our online shop to find our prices.

Fluid treatment conduction and analyses

Chemical concentration analyzer (GMT)

Advanced process monitors from GMT (Global Measurement Technologies) provide process engineers with the required exactness, reliability and adaptability when there is demand for higher yield and zero-defect tolerance. In this highly competitive production environment, only the most sophisticated equipment can perform highly complex processes without costly monitoring, yet delivering consistent production.

GMT process monitors offer the following advantages:

  • Enhanced process reproducibility and uniformity
  • Lower need of consumables and chemicals

4TEX is the exclusive partner of GMT (Global Measurement Technologies) when it comes to distribution, service of, and spare parts for GMT process monitors in Europe and other parts of the world, e.g. South America. Moreover, we offer staff training – at your company or at 4TEX – as well as repair service for Semichem / Ionchem 2005.